Metrology
Measures surface and textural properties by creating a composite 3-D image in true color of whatever is being scanned
Measures characteristic curves of semiconductor devices.
Highly accurate measuring tool for single or double thickness thin films measurements. Records index of refraction and thickness of various thin films.
Filmetrics F20 Film Measurement System
Measures the thickness and optical constants of any smooth, transparent or thin film with minimal light absorption
Measures the resistivity of silicon slices using a collinear four point probe array
Semiconductor parameter analyzer used for curve tracing and wafer testing.
Semiconductor parameter analyzer used for curve tracing and wafer testing.
General use microscope equipped with 5x, 10x, 20x, 50x, and 100x objective lenses. Equipped with a digital camera linked to a computer for recording observations.
The Metricon Prism Coupler allows for wafer measurements without an initial knowledge of the thickness. It allows for high accuracy measurements of many materials and substrates.
Reflectometry system to measure thickness of silicon dioxide, silicon nitride, photoresist and other films with a small spot size.
NI Parameter Analyzer(PXI-1033)
PCI eXtensions for Instrumentation (PXI) is a PC-based platform that offers a high-performance solution for measurement and automation systems. Currently the primary use for this parameter analyzer is to measure and analyze transistors on wafers.
Probe stations are used to make contact to microscopic features on a device
Surface height profile measurement of microscopic features. Capable of producing measurements up to 10 samples/micrometer.