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Metrology

3D Profilometer

Measures surface and textural properties by creating a composite 3-D image in true color of whatever is being scanned

    Curve Tracer

    Measures characteristic curves of semiconductor devices.

      Ellipsometer

      Highly accurate measuring tool for single or double thickness thin films measurements. Records index of refraction and thickness of various thin films.

        Filmetrics F20 Film Measurement System

        Measures the thickness and optical constants of any smooth, transparent or thin film with minimal light absorption

          Four Point Probe

          Measures the resistivity of silicon slices using a collinear four point probe array

            HP4145 Parameter Analyzer

            Semiconductor parameter analyzer used for curve tracing and wafer testing.

              HP4156A Parameter Analyzer

              Semiconductor parameter analyzer used for curve tracing and wafer testing.

                Leica Microscope

                General use microscope equipped with 5x, 10x, 20x, 50x, and 100x objective lenses. Equipped with a digital camera linked to a computer for recording observations.

                  Metricon Prism Coupler

                  The Metricon Prism Coupler allows for wafer measurements without an initial knowledge of the thickness. It allows for high accuracy measurements of many materials and substrates.

                    Nanospec 210

                    Reflectometry system to measure thickness of silicon dioxide, silicon nitride, photoresist and other films with a small spot size.

                      NI Parameter Analyzer(PXI-1033)

                      PCI eXtensions for Instrumentation (PXI) is a PC-based platform that offers a high-performance solution for measurement and automation systems. Currently the primary use for this parameter analyzer is to measure and analyze transistors on wafers.

                        Probe Station

                        Probe stations are used to make contact to microscopic features on a device

                          Profilometer

                          Surface height profile measurement of microscopic features. Capable of producing measurements up to 10 samples/micrometer.