Skip to main content
Electrical & Computer Engineering
Integrated Microfabrication Lab
Machine Scheduler

Acid Safety

Acids.mp4

Acids used in IML:

ChemicalSymbolPropertiesSpecial Precautions
AceticCH3COOHLiquid and vapors cause severe burns to skin. Reacts vigorously with oxidizing agents and other acids (particularly nitric). Odor similar to that of strong vinegar.Incompatible with most other acids. Store alone!
ChromicH2CRO4Liquid and vapors cause severe burns to skin. Corrosive to nasal passages. Contains a suspected carcinogen.Carcinogenic.
HydrochloricHCLHighly corrosive to skin and mucous membranes. Repeated exposure causes erosion of teeth. Strong chlorine odor detectable at 1-5 PPM.
HydrofluoricHFLiquid and vapors cause burns that may not be immediately painful or visible. HF attacks glass. HF looks like water and can kill in small amounts. Found in Buffered Oxide Etch (BOE).Use only plastic containers.
NitricHNO3Highly corrosive to skin, mucous membranes and teeth. Highly reactive with acetic acid. Reacts explosively with combustible organic or other oxidizable materials.Use only glass containers.
PhosphoricH3PO4Liquid is highly irritating to skin. Vapors are highly toxic. Contact with most metals causes formation of flammable and explosive hydrogen gas.
SulfuricH2SO4Liquid and vapors are extremely corrosive to skin and mucous membranes. Generates heat upon contact with water. Reacts with acetic acid.Keep away from water.

Bases used in the IML:

ChemicalSymbolPropertiesSpecial Precautions
Ammonium HydroxideNH4OHIrritating to skin and mucous membranes. Emits highly toxic vapors when heated.
Ammonium FluorideNH4FHighly toxic and irritating to skin and mucous membranes. Emits toxic vapors when heated or when in contact with acids.
Hydrogen PeroxideH2O2Strong oxidizing agent. Irritating to skin and mucous membranes. Reacts violently with acids and organic solvents.Cap with vented cap. Do not boil in open vessels, may cause explosion.
Phosphorous OxychloridePOCl3POCI3 and its vapors cause severe burns to the eyes, nose, throat, skin and mucous membranes. POCI3 and water, when combined, will form hydrochloric acid and will produce a violent, exothermic reaction. POCI3 is unstable at high temperatures.Keep away from water. Discard gloves discolored by POCI3. Discard yellow or cloudy POCI3 as it may be contaminated.