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Electrical & Computer Engineering
Integrated Microfabrication Lab
Machine Scheduler

Silicon Nitride RIE Etching

Equipment: Reactive Ion Etcher (RIE)
SCHEDULER IS REQUIRED
Simple Recipe

  1. Recipe
    1. Power: 100 W
    2. Pressure: 100 mTorr
    3. Gases: 3.1 SCCM O2, 25 SCCM CF4
  2. Etch Rate: unknown
  3. Selectivity: unknown