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Resistivity & Mobility Calculator/Graph for Various Doping Concentrations in Silicon



Resistivity & Mobility Calculator/Graph for Various Doping Concentrations in Silicon

Dopant:   Arsenic
  Boron
  Phosphorus
Impurity Concentration: (cm-3)

Mobility: [cm2/V-s]
Resistivity: [Ω-cm]

Note: Calculations are for a silicon substrate. Arsenic and Phosphorus provide electron mobilities, Boron provides hole mobility.

Resis…1E121E131E141E151E161E171E181E191E-21E-11E01E11E21E31E41E5Impurity ConcentrationResistivity (Ohm-cm)
Impurity concentrationResistivity
1E124,406.452
1E13441.299
1E1444.443
1E154.594
1E160.53
1E170.086
1E180.022
1E190.006

Source:

G. Masetti, M. Severi, and S. Solmi, "Modeling of Carrier Mobility Against Carrier Concentration in Arsenic-, Phosphorus-, and Boron-Doped Silicon," IEEE Trans. on Electron Dev., Vol. ED-30, No. 7 (July 1983), pp. 764-765.