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Electrical & Computer Engineering
Integrated Microfabrication Lab
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Photolithography Chemicals and Materials

This page gives data for the best known processing methods for various adhesion promoters and photoresists. The methods correspond to a specific use for each photoresist, which can be found be clicking on the photoresist name. The photolithography process can be changed to create different features.

Tables of Spin Speed vs Thickness
Basic Photolithography Process for Positive and Negative Photoresists
Basic Lithography Tutorial

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*Note: No change in exposure time has been observed when using the south aligner with the new filters.

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*Note: Exposure times for SU8 have increased by about 40% when using the south aligner with the new filters.

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