Oxide Thickness Calculator
Thickness Given Time
Calculate Time Given a Desired Thickness.
Use an interactive Color Chart to predict the color of Silicon Oxide or Silicon Nitride at a particular thickness.
*Constants taken from a chapter written by B. E. Deal in Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) / edited by Gary E. McGuire. (pp. 48-57)
*Equation taken from from B.E. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys., 36, 3770 (1965)
List of Thermal Oxide Physical Constants
| Property (units) | Value |
| Density (g/cm3) | 2.27 |
| Dielectric Constant | 3.9 |
| DC Resistivity @25°C (Ω-cm) | 1016 |
| Energy gap (eV) | ~9 |
| Thermal conductivity (W/cm2°C) | 0.014 |
| Linear expansion coefficient (ppm/°C) | 0.05 |
| Refractive index | 1.46 |
| Melting Point (°C) | ~1700 |
| Molecular weight | 60.08 |
| Molecules/cm3 | 2.3*1022 |
| Specific heat (J/g°C) | 1.0 |
| Film stress (at 25°C) dynes/cm2 | 2-4 x 1019 |
| IR absorption peak (mm) | 9.3 |
| Etch rate BHF (49%) nm/min | 100 |