Skip to main content
Electrical & Computer Engineering
Integrated Microfabrication Lab
Machine Scheduler

Clean Ovens

Clean Oven

Contact Information

Model: Ultra-Clean 100 (3497M-3)Faculty Contact: Aaron Hawkins
Manufacturer: Lab-Line InstrumentsStaff Contact: Jim Fraser
Maintenance RequestStudent Contact: Chris Leach
SCHEDULER IS REQUIRED
General Information
Equipment Specifications
Operating Procedure

The Ultra-Clean 100 oven incorporates a programmer-controller which can be conveniently and easily operated by the user from a front panel keyboard. The programmer-controller provides two ramp/dwell combinations which can be repeated up to 200 times or run continuously. Mnemonics in the display area of the programmer-controller keep the user informed of the parameters which are being acted upon. An additional option allows the unit to be operated in either automatic or manual modes.
Mechanical air circulation provides optimum temperature uniformity and rapid recovery after door openings.

Two systems protect oven contents against overheating. An alarm setpoint programmed in the controller initiates a visual signal in the event the actual temperature exceeds the limit. In addition, a second system is an independent hydraulic thermostat set by the operator to a temperature slightly higher than the maximum operating temperature. This thermostat is a mechanical backup to protect contents in the unlikely even the programmer-controller experiences a failure. A red status lamp warns of the over-temperature conditions.

  1. Temperature Range: Slightly above ambient to +250°C
  2. Temperature Control: �0.2°C (@90°C)
  3. Temperature Uniformity: �1.5°C (@90°C)
  4. Temperature Rise Times: 11.0 minutes (ambient to 90°C)
  5. Temperature Recovery: 22 seconds (@90°C; after 1 minute, door opening of 90-degrees)
  1. The programmer-controller operates in a fixed-format, 4-part program: Ramp, Dwell, Ramp, and Dwell. The 4 parts are executed consecutively - when the first is finished, the second is begun automatically and continues in the manner until the last segment is completed. The program can be run in a loop between 1 and 200 times continuously.The setpoint can be freely changed within the specified limits (slightly above ambient to +250°C). The setpoint in a program increases or decreases at a linear ramping rate until a specified target level is reached. The target level can be either above or below the current measured value.

Program Controller

  1. Ramp-to-Setpoint - this green LED lights up when the programmer-controller is ramping from the measured value to the new setpoint. When PAR button (5) is pressed in order to check on the current setpoint during the ramping process, the LED dot will flash. When the setpoint is reached, the LED goes out.
  2. Manual Mode - this LED lights up when the controller is in manual mode.
  3. Output 1 Energized Light.
  4. Auto/Manual Operation - depressing the A/M button permits switching from automatic to manual operation and back again. WARNING: DO NOT OPERATE OVEN IN MANUAL MODE.
  5. Parameter Scroll Key - the button has two functions: First, to scroll to the next parameter in the list. Second, to acknowledge an alarm.
  6. Upper LED Display - shows measured value or the parameter mnemonics when scanning the parameter list with the PAR button (5).
  7. Lower LED Display - shows temperature setpoint when in the automatic mode; parameter value when viewing the parameter list with PAR button (5).
  8. Output 2 Energized Light (not used.)
  9. Decrease Parameter Value.
  10. Increase Parameter Value.
  11. Jacking Screw.

Programming Procedures

  1. Press PAR until LC (loop counter) appears in the upper display. Use the up or down arrows to enter the number of times you wish the program to repeat (1-200).
  2. Press PAR until r1 (1st ramp rate) is in the upper display. Enter the numerical value of the rate (degrees Celsius per minute) you wish to advance to the 1st setpoint.
  3. Press PAR until you reach L1 (1st setpoint temperature). Enter the desired target temperature.
  4. Press PAR until you reach d1 (1st dwell time). Enter length of time you want to dwell at the 1st setpoint temperature.
  5. Repeat the above procedure to enter in r2, L2, and d2 (2nd ramp rate, 2nd setpoint temperature, and 2nd dwell time, respectively).
  6. Scroll down the parameter list with PAR until Prog appears. Press the up or down arrows until the program state parameter run appears in the lower display.
  7. Either press PAR or let the display time out to move into the run program state. Note: Once the program is in the run state, the parameters LC, r1, L1, d1, r2, L2, and d2 cannot be adjusted. To make adjustments, first enter the Hold program state (see below) and then resume the program operation.
  8. NOTES:
    1. If the dwell segment is selected for viewing during run, the time remaining will be displayed.
    2. If the LC segment is selected for viewing during run, the number of loops remaining will be displayed.

Holding a program

- Hold

  1. When the programmer-controller is in Hold, timing is suspended and temporary adjustments of the parameters can be made. The time elapsed while the programmer-controller is in Hold increases the total run time of the program. To enter the Hold parameter, follow this procedure:
  2. Scroll down the parameter list with PAR until Prog displays. Push the up or down arrows until Hold appears in the lower display.
  3. Either press PAR or let the display time out to enter the Hold program state.
  4. Temporary changes to program parameters can now be made if desired.
  5. When the programmer-controller is in the Hold state, the R-lamp in the upper left hand corner of the display area will flash.
  6. NOTE: Changes made to parameters LC, r1, L1, d1, r2, L2, and d2 during Hold are valid only during the current loop of the program. To make permanent changes to the parameters, you must enter the IdlE programming state instead (see below).
  1. A program can be placed in Idle as follows:
    1. Scroll down the parameter list with PAR until Prog is displayed.
    2. Press the up or down arrows until Idle appears in the lower display.
    3. Either press PAR or let the display time out to enter the Idle program state.
    4. Permanent changes to the program parameters can now be made if desired.
    5. When the program has entered the idle state, the status-lamp-R goes out.
    6. NOTE: Changes made to all parameters in Idle are permanent. Contrast with Hold where changes made are temporary (only for current loop of the program).