Karl Suss MA6 Aligners
Information | Contact Information |
| Manufacturer: SUSS MicroTec (formerly Karl Suss KG) | Faculty Contact: Aaron Hawkins |
| Maintenance Request | Staff Contact: Joe Bussio |
Warnings
General Information
Equipment Specifications
Operating Procedure
The SUSS MicroTec MA6 Aligner is the heart of the BYU Cleanroom and photolithography processes that occur here. Designed for research and small-scale processes, the MA6 both places the mask (aligns it) with reference to the wafer and also exposes the wafer to UV light. Controls and a microscope help the user easily adjust the wafer and mask alignment to allow for development of high quality features.
Both Aligners
- Manufacturer: Suss MicroTec / Karl Suss
- Wafer Size: Small Pieces up to 6”/150mm Diameter Wafers
- Topside (TSA) Alignment
- Backside (BSA) Alignment
- Suss DVM6 Microscope
- Multiple microscope objectives
- CIC 500 Power Supply
- Capable of Hard, Soft, Vacuum Contact with proper tooling.
- Vibration Isolation Table (for Suss MA6)
- One Chuck included
- One Maskholder included
- System Power: 230V, 50/60 Hz
North Aligner
- UV400 Optics (for 365nm and 405nm exposure)
- 350W Lamphouse
South Aligner
- Equipped with aftermarket LED lamp
coming soon