Equipment Manufacturers

Lithography

Mask Alignment

• SUSS MicroTec (Tamarack)
• EV Group (EVG)
• OIA
• ABM
• Union Optical

Mask Pattern Generators

• Heidelberg Instruments
• Miva Technologies
• First EIE

Wafer Spinning

• Solitec
• Laurell
• Headway
• Brewer Science

Etching

Reactive Ion Etching

• Cannon Anelva
• Surface Technology Systems (Now SPTS)
• Oxford Instruments
• Trion
• Samco
• Aviza Technology (SPTS)

Etchers/Ashers

• Tegal (SPTS)
• JLS Designs
• Axic
• PVA TePla
  

Measurements

Ellipsometry

• Gaertner Scientific
• Horiba Group
• Ocean Optics
• DigiPol Technologies (Rudolph Instruments)
• Scientific Computing International

Semiconductor Parameter Analyzer

• Agilent

Film Measurement

• Nanospec
• KLA Tencor
• Scientific Computing International

Optical Profiler

• Zygo
• Veeco
• KLA-Tencor

Profilometer

• KLA-Tencor
• Veeco

Annealing and Diffusion

Rapid Thermal Annealer

• Axic Incorporated AnnealSys
• SPECS Technologies Corporation

Thermal Diffusion

• BTU International
• Thermco Systems
• MRL Industries
• Centrotherm

Film Depostion and Growth

Chemical vapor Depostition (PECVD)

• Surface Technology Systems (SPTS)
• Oxford Instruments
• Trion
• Lam Research (Novellus)
• Oerlikon Balzer

Vapor Deposition

• Denton Vacuum
• CHA Industries
• Veeco
• BOC Edwards Temescal