Equipment Manufacturers
Lithography
Mask Alignment
- SUSS MicroTec (Tamarack) (opens in a new tab)
- EV Group (EVG) (opens in a new tab)
- OIA (opens in a new tab)
- ABM (opens in a new tab)
- Union Optical (opens in a new tab)
Mask Pattern Generators
- Heidelberg Instruments (opens in a new tab)
- Miva Technologies (opens in a new tab)
- First EIE (opens in a new tab)
Wafer Spinning
- Solitec (opens in a new tab)
- Laurell (opens in a new tab)
- Headway (opens in a new tab)
- Brewer Science (opens in a new tab)
Etching
Reactive Ion Etching
- Cannon Anelva (opens in a new tab)
- Surface Technology Systems (Now SPTS) (opens in a new tab)
- Oxford Instruments (opens in a new tab)
- Trion (opens in a new tab)
- Samco (opens in a new tab)
- Aviza Technology (SPTS) (opens in a new tab)
Etchers/Ashers
Measurements
Ellipsometry
- Gaertner Scientific (opens in a new tab)
- Horiba Group (opens in a new tab)
- Ocean Optics (opens in a new tab)
- DigiPol Technologies (Rudolph Instruments) (opens in a new tab)
- Scientific Computing International (opens in a new tab)
Semiconductor Parameter Analyzer
Film Measurement
- Nanospec (opens in a new tab)
- KLA Tencor (opens in a new tab)
- Scientific Computing International (opens in a new tab)
Optical Profiler
Profilometer
Annealing and Diffusion
Rapid Thermal Annealer
Thermal Diffusion
- BTU International (opens in a new tab)
- Thermco Systems (opens in a new tab)
- MRL Industries (opens in a new tab)
- Centrotherm (opens in a new tab)
Film Depostion and Growth
Chemical vapor Depostition (PECVD)
- Surface Technology Systems (SPTS) (opens in a new tab)
- Oxford Instruments (opens in a new tab)
- Trion (opens in a new tab)
- Lam Research (Novellus) (opens in a new tab)
- Oerlikon Balzer (opens in a new tab)
Vapor Deposition