Equipment Manufacturers
Lithography
Mask Alignment
Mask Pattern Generators
Wafer Spinning
Etching
Reactive Ion Etching
- Cannon Anelva
- Surface Technology Systems (Now SPTS)
- Oxford Instruments
- Trion
- Samco
- Aviza Technology (SPTS)
Etchers/Ashers
Measurements
Ellipsometry
- Gaertner Scientific
- Horiba Group
- Ocean Optics
- DigiPol Technologies (Rudolph Instruments)
- Scientific Computing International
Semiconductor Parameter Analyzer
Film Measurement
Optical Profiler
Profilometer
Annealing and Diffusion
Rapid Thermal Annealer
Thermal Diffusion
Film Depostion and Growth
Chemical vapor Depostition (PECVD)
Vapor Deposition