Oxide Growth Calculator
Thickness Given Time
Calculate Time Given a Desired Thickness.
Use an interactive Color Chart to predict the color of Silicon Oxide or Silicon Nitride at a particular thickness.
*Constants taken from a chapter written by B. E. Deal in Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) / edited by Gary E. McGuire. (pp. 48-57)
*Equation taken from from B.E. Deal and A. S. Grove, "General Relationship for the Thermal Oxidation of Silicon," J. Appl. Phys., 36, 3770 (1965)
List of Thermal Oxide Physical Constants
|DC Resistivity @25°C (Ω-cm)||1016|
|Energy gap (eV)||~9|
|Thermal conductivity (W/cm2°C)||0.014|
|Linear expansion coefficient (ppm/°C)||0.05|
|Melting Point (°C)||~1700|
|Specific heat (J/g°C)||1.0|
|Film stress (at 25°C) dynes/cm2||2-4 x 1019|
|IR absorption peak (mm)||9.3|
|Etch rate BHF (49%) nm/min||100|