Impurity Profiles for Diffusion in Common Semiconductors
Select a semiconductor:
Silicon (Si) Germanium (Ge) Aluminum Antimonide (AlSb) |
Gallium Arsenide (GaAs) Gallium Phosphide (GaP) Gallium Antimonide (GaSb) |
Indium Arsenide (InAs) Indium Phosphide (InP) Indium Antimonide (InSb) |
Select a dopant:
Boron (B) Aluminum (Al) Gallium (Ga) Indium (In) |
Phosphorus (P) Arsenic (As) Antimony (Sb) Bismuth (Bi) |
Copper (Cu) Lithium (Li) Sodium (Na) Potassium (K) |
Hydrogen (H) Helium (He) |
Select a profile:
Constant-Surface | Constant-Total-Dopant |
Enter the surface concentration: [cm-3]
Enter the annealing temperature: [°C] (900 to 1350)
Enter the annealing time: [min] (1 to 600)
Enter the substrate depth: [µm] (0 to 10)
Impurity concentration at the specified substrate depth [cm-3]
Impurity Concentration vs. Substrate Depth for above Parameters
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