Impurity Profiles for Diffusion in Common Semiconductors
Impurity Concentration vs. Substrate Depth for above Parameters
| Depth | Dopant concentration |
|---|---|
| 0.000 | 999,999,999,000,000 |
| 0.014 | 936,049,892,386,414.512 |
| 0.028 | 872,510,186,330,108.512 |
| 0.042 | 809,782,905,818,395.256 |
| 0.055 | 748,254,748,051,000.768 |
| 0.069 | 688,289,865,161,152.128 |
| 0.083 | 630,223,389,936,266.256 |
| 0.097 | 574,355,882,355,877.896 |
| 0.111 | 520,948,837,928,476.384 |
| 0.125 | 470,221,356,383,219.384 |
| 0.139 | 422,348,023,595,437 |
| 0.153 | 377,458,013,143,108.576 |
| 0.166 | 335,635,369,001,485.256 |
| 0.180 | 296,920,389,781,956.32 |
| 0.194 | 261,311,999,478,806.896 |
| 0.208 | 228,770,961,346,731.256 |
| 0.222 | 199,223,771,245,110.576 |
| 0.236 | 172,567,054,987,459.352 |
| 0.250 | 148,672,290,855,166.288 |
| 0.264 | 127,390,682,941,052.48 |
| 0.277 | 108,558,022,457,940 |
| 0.291 | 91,999,391,360,232.384 |
| 0.305 | 77,533,584,167,874.368 |
| 0.319 | 64,977,148,248,967.168 |
| 0.333 | 54,147,968,519,014.376 |
| 0.347 | 44,868,348,161,393.072 |
| 0.361 | 36,967,561,347,716.504 |
| 0.374 | 30,283,876,044,660.096 |
| 0.388 | 24,666,064,095,722.916 |
| 0.402 | 19,974,431,385,718.752 |
| 0.416 | 16,081,412,810,011.408 |
| 0.430 | 12,871,784,986,877.356 |
| 0.444 | 10,242,554,371,306.5 |
| 0.458 | 8,102,580,005,047.821 |
| 0.472 | 6,371,989,029,939.739 |
| 0.485 | 4,981,439,820,114.675 |
| 0.499 | 3,871,282,694,645.984 |
| 0.513 | 2,990,662,182,242.865 |
| 0.527 | 2,296,598,208,165.302 |
| 0.541 | 1,753,076,783,156.948 |
| 0.555 | 1,330,174,143,355.123 |
| 0.569 | 1,003,232,088,247.93 |
| 0.583 | 752,096,682,109.182 |
| 0.596 | 560,427,641,759.564 |
| 0.610 | 415,081,685,222.418 |
| 0.624 | 305,569,864,525.568 |
| 0.638 | 223,586,413,288.568 |
| 0.652 | 162,604,838,314.984 |
| 0.666 | 117,535,788,038.969 |
| 0.680 | 84,440,543,865.583 |
| 0.694 | 60,293,705,982.151 |
| 0.707 | 42,788,689,944.229 |
| 0.721 | 30,179,929,256.247 |
| 0.735 | 21,156,118,024.779 |
| 0.749 | 14,739,364,219.807 |
| 0.763 | 10,205,707,975.608 |
| 0.777 | 7,023,052,048.472 |
| 0.791 | 4,803,124,825.425 |
| 0.804 | 3,264,630,933.808 |
| 0.818 | 2,205,228,778.474 |
| 0.832 | 1,480,402,375.02 |
| 0.846 | 987,665,265.795 |
| 0.860 | 654,848,892.556 |
| 0.874 | 431,490,502.328 |
| 0.888 | 282,551,630.981 |
| 0.902 | 183,873,237.858 |
| 0.915 | 118,913,491.72 |
| 0.929 | 76,424,656.381 |
| 0.943 | 48,811,655.939 |
| 0.957 | 30,981,273.658 |
| 0.971 | 19,541,538.054 |
| 0.985 | 12,248,984.826 |
| 0.999 | 7,629,947.008 |
| 1.013 | 4,723,036.073 |
| 1.026 | 2,905,344.521 |
| 1.040 | 1,776,024.772 |
| 1.054 | 1,078,881.651 |
| 1.068 | 651,284.138 |
| 1.082 | 390,694.699 |
| 1.096 | 232,902.142 |
| 1.110 | 137,967.637 |
| 1.123 | 81,217.033 |
| 1.137 | 47,509.663 |
| 1.151 | 27,617.242 |
| 1.165 | 15,952.906 |
| 1.179 | 9,157.231 |
| 1.193 | 5,223.266 |
| 1.207 | 2,960.632 |
| 1.221 | 1,667.555 |
| 1.234 | 933.364 |
| 1.248 | 519.14 |
| 1.262 | 286.882 |
| 1.276 | 157.541 |
| 1.290 | 85.931 |
| 1.304 | 46.629 |
| 1.318 | 25.091 |
| 1.332 | 13.434 |
| 1.345 | 7.105 |
| 1.359 | 3.775 |
| 1.373 | 1.998 |
| 1.387 | 0.999 |
Background (click to expand)
where 'F' is the flux defined as the number of dopant atoms passing through a unit area in a unit of time. 'C' is the dopant concentration per unit volume, and 'D' is the diffusion coefficient or diffusivity of the semiconductor.
Fick's second law is the continuity equation defined below with the first law substituted appropriately
This equation can be simplified when the diffusion coefficient 'D' is independent of the doping concentration 'C' as follows
If the diffusion coefficient is not independent, the continuity equation becomes very difficult to solve even when basic conditions are applied. The calculator and graph associated with this page are based on independent diffusion coefficients and low doping concentrations. The diffusion coefficient can usually be expressed as
where 'Ea' is the activation energy measured in 'eV' of the dopant or impurity being diffused and 'D0' is the diffusion coefficient extrapolated to infinite temperature. The activation energy is dependent on both the element being diffused and the specific semiconductor that it is being diffused into.
Fick's second law or the continuity equation can be solved for a variety of different initial and boundary conditions. Each solution represents a different diffusion profile. Two of the most common profiles are available as part of this calculator.
Constant-Surface-Concentration Diffusion
The initial condition for this profile is a dopant concentration of zero
inside the semiconductor substrate. For this profile the dopant
concentration at the surface of the semiconductor remains constant, and
the concentration eventually goes to zero at some point in the
semiconductor. These conditions can be summarized mathematically
as
The solution to Fick's second law meeting these conditions is
where erfc is the complementary error function. This calculator is equipped to calculate dopant levels and impurity concentrations at specific depths in various semiconductors for a variety of conditions. It is also capable of graphing the overall diffusion profile.
Constant-Total-Dopant Diffusion
The initial condition for this profile is the same as the
constant-surface profile in that there exists a zero impurity
concentration in the semiconductor. However, the boundary
conditions for this profile are different. For this profile, a
constant or fixed amount of impurities or dopants is deposited on the
surface of the semiconductor rather than maintaining a set surface
concentration as in the previous profile. These boundary
conditions can be summarized mathematically as
Given these conditions, the solution to Fick's second law, the continuity equation, or the diffusion equation is
This profile is a Gaussian distribution and is the other diffusion profile supported by this calculator and graph.
Extrinsic vs. Intrinsic Diffusion
The profiles calculated here are based on intrinsic diffusion.
Intrinsic diffusion is represented by constant diffusivities, and doping
concentrations being less than then intrinsic-carrier concentration at
the diffusion temperature. The intrinsic-carrier concentration for
silicon at 1000°C is 5 X 1018 cm-3 and 5 X 1017
cm-3 for gallium arsenide. If the dopant-impurity
concentration exceeds the intrinsic-carrier concentration at the
diffusion temperature, then the diffusion becomes extrinsic, and the
profiles become more complicated.
This calculator does not verify whether the diffusion conditions
inputted meet the constraint of intrinsic diffusion. It is
assumed the user is knowledgeable as to whether or not the conditions
meet the intrinsic diffusion requirement. This calculator is
entirely theoretical and predicts the diffusion profiles
mathematically; however, some diffusion profiles may not be
experimentally possible depending on the impurity, the semiconductor,
and other diffusion parameters such as temperature.
References
H.C. Casey, and G.L. Pearson, "Diffusion in Semiconductors," in J.H.
Crawford, and L.M. Slifkin, Eds.,Point Defects in Solids, Vol. 2,
Plenum, New York, 1975.
S.M. Sze, Semiconductor Devices: Physics and Technology, 2nd
Ed., Wiley, New York, 2002.