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Impurity Profiles for Diffusion in Common Semiconductors



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Silicon dopants

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Impurity Concentration vs. Substrate Depth for above Parameters

Dopant concentration 0.000 0.083 0.166 0.250 0.333 0.416 0.499 0.583 0.666 0.749 0.832 0.915 0.999 1.082 1.165 1.248 1.332 1E1 1E3 1E5 1E7 1E9 1E11 1E13 1E15 Depth in substrate (um) Impurity Concentration (atoms/cm^2)
Depth Dopant concentration
0.000 999,999,999,000,000
0.014 936,049,892,386,414.512
0.028 872,510,186,330,108.512
0.042 809,782,905,818,395.256
0.055 748,254,748,051,000.768
0.069 688,289,865,161,152.128
0.083 630,223,389,936,266.256
0.097 574,355,882,355,877.896
0.111 520,948,837,928,476.384
0.125 470,221,356,383,219.384
0.139 422,348,023,595,437
0.153 377,458,013,143,108.576
0.166 335,635,369,001,485.256
0.180 296,920,389,781,956.32
0.194 261,311,999,478,806.896
0.208 228,770,961,346,731.256
0.222 199,223,771,245,110.576
0.236 172,567,054,987,459.352
0.250 148,672,290,855,166.288
0.264 127,390,682,941,052.48
0.277 108,558,022,457,940
0.291 91,999,391,360,232.384
0.305 77,533,584,167,874.368
0.319 64,977,148,248,967.168
0.333 54,147,968,519,014.376
0.347 44,868,348,161,393.072
0.361 36,967,561,347,716.504
0.374 30,283,876,044,660.096
0.388 24,666,064,095,722.916
0.402 19,974,431,385,718.752
0.416 16,081,412,810,011.408
0.430 12,871,784,986,877.356
0.444 10,242,554,371,306.5
0.458 8,102,580,005,047.821
0.472 6,371,989,029,939.739
0.485 4,981,439,820,114.675
0.499 3,871,282,694,645.984
0.513 2,990,662,182,242.865
0.527 2,296,598,208,165.302
0.541 1,753,076,783,156.948
0.555 1,330,174,143,355.123
0.569 1,003,232,088,247.93
0.583 752,096,682,109.182
0.596 560,427,641,759.564
0.610 415,081,685,222.418
0.624 305,569,864,525.568
0.638 223,586,413,288.568
0.652 162,604,838,314.984
0.666 117,535,788,038.969
0.680 84,440,543,865.583
0.694 60,293,705,982.151
0.707 42,788,689,944.229
0.721 30,179,929,256.247
0.735 21,156,118,024.779
0.749 14,739,364,219.807
0.763 10,205,707,975.608
0.777 7,023,052,048.472
0.791 4,803,124,825.425
0.804 3,264,630,933.808
0.818 2,205,228,778.474
0.832 1,480,402,375.02
0.846 987,665,265.795
0.860 654,848,892.556
0.874 431,490,502.328
0.888 282,551,630.981
0.902 183,873,237.858
0.915 118,913,491.72
0.929 76,424,656.381
0.943 48,811,655.939
0.957 30,981,273.658
0.971 19,541,538.054
0.985 12,248,984.826
0.999 7,629,947.008
1.013 4,723,036.073
1.026 2,905,344.521
1.040 1,776,024.772
1.054 1,078,881.651
1.068 651,284.138
1.082 390,694.699
1.096 232,902.142
1.110 137,967.637
1.123 81,217.033
1.137 47,509.663
1.151 27,617.242
1.165 15,952.906
1.179 9,157.231
1.193 5,223.266
1.207 2,960.632
1.221 1,667.555
1.234 933.364
1.248 519.14
1.262 286.882
1.276 157.541
1.290 85.931
1.304 46.629
1.318 25.091
1.332 13.434
1.345 7.105
1.359 3.775
1.373 1.998
1.387 0.999

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