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Impurity Profiles for Diffusion in Common Semiconductors



Select a semiconductor:

Silicon (Si)
Germanium (Ge)
Aluminum Antimonide (AlSb)
Gallium Arsenide (GaAs)
Gallium Phosphide (GaP)
Gallium Antimonide (GaSb)
Indium Arsenide (InAs)
Indium Phosphide (InP)
Indium Antimonide (InSb)

Select a dopant:

Boron (B)
Aluminum (Al)
Gallium (Ga)
Indium (In)
Phosphorus (P)
Arsenic (As)
Antimony (Sb)
Bismuth (Bi)
Copper (Cu)
Lithium (Li)
Sodium (Na)
Potassium (K)
Hydrogen (H)
Helium (He)

Select a profile:

Constant-Surface Constant-Total-Dopant
Enter the surface concentration: [cm-3]

Enter the annealing temperature: [°C] (900 to 1350)

Enter the annealing time: [min] (1 to 600)

Enter the substrate depth: [µm] (0 to 10)

Impurity concentration at the specified substrate depth [cm-3]

Impurity Concentration vs. Substrate Depth for above Parameters

Dopantconcentration0.0000.0830.1660.2500.3330.4160.4990.5830.6660.7490.8320.9150.9991.0821.1651.2481.3321E11E31E51E71E91E111E131E15Depth in substrate (um)Impurity Concentration (atoms/cm^2)
DepthDopant concentration
0.000999,999,999,000,000
0.014936,049,892,386,414.512
0.028872,510,186,330,108.512
0.042809,782,905,818,395.256
0.055748,254,748,051,000.768
0.069688,289,865,161,152.128
0.083630,223,389,936,266.256
0.097574,355,882,355,877.896
0.111520,948,837,928,476.384
0.125470,221,356,383,219.384
0.139422,348,023,595,437
0.153377,458,013,143,108.576
0.166335,635,369,001,485.256
0.180296,920,389,781,956.32
0.194261,311,999,478,806.896
0.208228,770,961,346,731.256
0.222199,223,771,245,110.576
0.236172,567,054,987,459.352
0.250148,672,290,855,166.288
0.264127,390,682,941,052.48
0.277108,558,022,457,940
0.29191,999,391,360,232.384
0.30577,533,584,167,874.368
0.31964,977,148,248,967.168
0.33354,147,968,519,014.376
0.34744,868,348,161,393.072
0.36136,967,561,347,716.504
0.37430,283,876,044,660.096
0.38824,666,064,095,722.916
0.40219,974,431,385,718.752
0.41616,081,412,810,011.408
0.43012,871,784,986,877.356
0.44410,242,554,371,306.5
0.4588,102,580,005,047.821
0.4726,371,989,029,939.739
0.4854,981,439,820,114.675
0.4993,871,282,694,645.984
0.5132,990,662,182,242.865
0.5272,296,598,208,165.302
0.5411,753,076,783,156.948
0.5551,330,174,143,355.123
0.5691,003,232,088,247.93
0.583752,096,682,109.182
0.596560,427,641,759.564
0.610415,081,685,222.418
0.624305,569,864,525.568
0.638223,586,413,288.568
0.652162,604,838,314.984
0.666117,535,788,038.969
0.68084,440,543,865.583
0.69460,293,705,982.151
0.70742,788,689,944.229
0.72130,179,929,256.247
0.73521,156,118,024.779
0.74914,739,364,219.807
0.76310,205,707,975.608
0.7777,023,052,048.472
0.7914,803,124,825.425
0.8043,264,630,933.808
0.8182,205,228,778.474
0.8321,480,402,375.02
0.846987,665,265.795
0.860654,848,892.556
0.874431,490,502.328
0.888282,551,630.981
0.902183,873,237.858
0.915118,913,491.72
0.92976,424,656.381
0.94348,811,655.939
0.95730,981,273.658
0.97119,541,538.054
0.98512,248,984.826
0.9997,629,947.008
1.0134,723,036.073
1.0262,905,344.521
1.0401,776,024.772
1.0541,078,881.651
1.068651,284.138
1.082390,694.699
1.096232,902.142
1.110137,967.637
1.12381,217.033
1.13747,509.663
1.15127,617.242
1.16515,952.906
1.1799,157.231
1.1935,223.266
1.2072,960.632
1.2211,667.555
1.234933.364
1.248519.14
1.262286.882
1.276157.541
1.29085.931
1.30446.629
1.31825.091
1.33213.434
1.3457.105
1.3593.775
1.3731.998
1.3870.999

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