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    Lithography

    Equipment specifications for photolithography: aligners, spinners and more.

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    Film Deposition & Growth

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    Wafer Specifications
    Wafer Specifications

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    Types of Wafer Substrates

    A wafer after cleanroom fabrication, ready to be processed into individual parts and packaged.

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    MatLab Tutorial

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    Related Journals

    Above is a link of several journals related to microfabrication and nanofabrication.

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  • Photolithography Resources
  • Photomasks

Photomasks

MASK DESIGN

We usually design our photomasks with Cadence. This is a tutorial on using Cadence.

    HIGH-RESOLUTION MASK PRINTING

    High resolution printing can be used as a lower-cost solution to make photomasks with features down to 50 microns.

      IN-HOUSE MASK PRODUCTION (PATTERN GENERATOR)

      We can produce our own photomasks with the pattern generator in the IML.

        COMMERCIAL MASK PRODUCTION

        Links to several commercial photomask production facilities.

           

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