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PE2 Plasma Etcher

Planar Etch II (PE2) Machine

Maintenance Request for PE 2

Contact Information:
  Faculty Contact:   Aaron Hawkins 
  Staff Contact:   Jim Fraser
  Student Contact:   Katy Dallon
 

 

 

  1. General Description
  2.  
  3. Operating Instructions
  4.  
  5. Etch Rates