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Ellipsometer 
Gaertner Scientific Corporation 
Model No. 1169-AK 
Manufacture Date: July 1988 
Contact Information:
  Faculty Contact:   Aaron Hawkins 
  Staff Contact:   Jim Fraser
  Student Contact:   Steve Hammon

 

  1. General Information and Usage
  2. Measurement Procedure
  3. Data Conversion
  4. Film Thickness and Index Graphs

Ellipsometry Calculator 
This calculator uses the P1, A1, P2, and A2 angles found using an ellipsometer to calculate delta, psi, index and thickness. A "Time and Rate Calculator" is also included; it uses the thickness calculated from the Ellipsometry calculator along with the test wafer growth time and desired thickness to calculate the rate of growth and the time needed to grow the desired thickness at that rate.