- General Information and Usage
- This equipment is used to measure the thickness and index of refraction for thin dielectric films.
- Measurement Procedure
- Data Conversion
- A set of five graphs and a document consisting of Ellipsometric Tables for measuring single-layer, transparent (non-absorbing) film thickness on a silicon substrate are supplied with L117 Ellipsometer as Standard Data Conversion accessories.
- Film Thickness and Index Graphs
This calculator uses the P1, A1, P2, and A2 angles found using an ellipsometer to calculate delta, psi, index and thickness. A "Time and Rate Calculator" is also included; it uses the thickness calculated from the Ellipsometry calculator along with the test wafer growth time and desired thickness to calculate the rate of growth and the time needed to grow the desired thickness at that rate.