Spin Speed and Thickness

Tables of various photoresists used in the BYU Cleanroom. These tables are rough estimates of photoresist thicknesses obtained at different spin speeds.
NOTE: When changing the thickness of the photoresist layer the appropriate exposure time and developing time will change as well.

AZ 3312

Spin Speed (rpm) Thickness (nm)
1000 2200
2000 1550
3000 1250
4000 1100
5000 950
6000 900

AZ 3330

Spin Speed (rpm) Thickness (nm)
1000 5250
2000 3700
3000 3000
4000 2500
5000 2300
6000 2100

Shipley 1.2L

Spin Speed (rpm) Thickness (nm)
2000 1900
3000 1590
4000 1400
5000 1300
6000 1200
7000 1020

Shipley 1.8L

Spin Speed (rpm) Thickness (nm)
2000 2800
3000 2300
4000 2000
5000 1800
6000 1620
7000 1550
 

SU-8 5

Spin Speed (rpm) Thickness (nm)
1000 7000
2000 4000
3000 3250
4000 2700
5000 2400
6000 2200

SU-8 10

Spin Speed (rpm) Thickness (nm)
1000 -
2000 -
3000 -
4000 -
5000 -
6000 -

SU-8 25

Spin Speed (rpm) Thickness (nm)
1000 32000
2000 13000
3000 9500
4000 7500
5000 7000
6000 6600

nLOF 2020

Spin Speed (rpm) Thickness (nm)
1000 3400
2000 2350
3000 1900
4000 1700