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Chemical Etching - Metals and Semiconductors
A list providing some general etch information. Specific etches of certain materials are given, along with information about what else should or should not be etched by the etchant. Some etch rates are provided.
A comprehensive list of etchants for over 50 different metals, semiconductors and cleanroom materials. Some etch rates are given. The ratios are volume ratios unless other units are specified.
Etch rates For silicon, silicon nitride, and silicon dioxide in varying concentrations and temperatures of KOH.
Reference: J. Electrochem. Soc. Vol 137, 11, Nov 1990, 3612-3632.
Some companies and the products they offer for metal and semiconductor etching.
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